Furnace System-Diffusion, PECVD, BBr3
We have versatile horizontal furnace system that is configurable to meet our customer demands in the semiconductor, solar, MEMS and photonics industries. Its use ranges from small batch R&D and pilot line production purposes, to high volume manufacturing processing. Our R&D systems are used in many advanced research centers worldwide, with state of the art proccesses and continuously new process developments.
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