The Diffusion Furnace with 5-stack platform is designed for high volume solar manufacturing and dedicated for POCl3, BBr3, and Anneal / Oxidation processes. The advanced system set-up handles high wafer loads while ensuring stable, reproducible and versatile process conditions at the lowest cost of ownership. The compact design includes low-loss heating elements and environmentally friendly recirculating air cooling, resulting in more than 25[%] energy savings. The system comes with integrated full automation.

Processes : POCl3  / BBr3  /  Anneal / Oxidation / LPCVD Poly

Key system features

• 5 independent tubes
• Pre-installed process recipes for up to 140 Ω/sq sheet resistance with good within-wafer uniformity
• Integrated solution using Tempress’ small pitch back-to-back full automation
• 5-stack system with height < 3,20 m
• Proven in full production

Customer benefits

• Plug and play solution, similar to industry standard atmospheric POCl3
• Fast process qualification, allowing steep production ramp-up
• Very low maintenance cost due to reliable atmospheric process
• Maximum uptime and lowest cost of ownership together with excellent service and support ensures long term successful production capacity