High-purity fluid handling & Surface Texturing solution
We have ultrapure fluid handling products for fabricating semiconductors, solar cells, LEDs, Flat-panel displays and electronics, chemicals manufacturing, and industrial applications. Our specialized equipment is used to deliver, circulate, dispense, and reclaim high-purity fluids for wet processes utilizing deionized water, corrosive alkaline or acidic chemical solutions, and toxic liquids such as fuels, glues, paints, resins, inks, and wastewater.
We have solution for Batch and Inline type handling for PV cells
Batch Type:
Optimized system for high efficiency solar cell (n-type) .Ultra capacity batch equipment (highest cost performance)
Features & Benefits
- Various batch application
Alkaline / Acidic texturing
pSC1 / SC2 / O3 cleaning
Oxidation
600 wafers load
up to 12,000 w/h
Up to M12 (210 x 210mm)
+/- 2%
- Perfect Drying
- Non metal component
Inline Type :Optimized system for n-type inline application.
Features & Benefits
- Various cleaning solutions
Roller brush / Disc brush
Bubble jet
Ultrasonic / Plasma
- Particle free design
- Capable Si wafer size
up to M12 (210 x 210mm)
- Perfect Drying
- Various inline application
HF/Metal Cleaning
RCA & O3 Cleaning
Developing / Etching / Striping
Electrical deposition