Sheet Resistance
We provide the widest range of tools to measure sheet resistance by both contact (by 4 point Mercury probe) and non-contact method.
For contact type measurement, we use Mercury probe. This permits our systems to probe and characterize a wide range of materials , including semi-conductors , oxides, dielectrics , SOI (Silicon on Insulator ), and films on conducting or insulating substrates.
- small low budget manually operated systems
- research and development oriented desktop systems
- production-line oriented fully automated cassette to cassette systems capable of handling wafers up to 300mm in diameter or flat panels
- customized tools
For non-contact type measurement, we use Eddy current for sheet resistance measurements. Its accuracy and its ability to measure in contactless mode has a special user value. Key benefits of eddy current resistance testing are:
- Non-contact mode
- Ultra-fast (20 ms / measurement)
- High repeatability and accuracy
- Large distances from sensor to substrate
- Transmission mode and reflective mode
- Measurement through encapsulation
- No wearing
- Large measurement range from 0.1 mOhm/sq to 100 kOhm/sq (9 decades)
We have wide range of testing devices for Industry and R&D laboratories.
- Handheld
- Laboratory / Benchtop
- Inline / Tool integrated