Product Details


We have a batch-type PECVD system for AIOx, SiOx and SiNx deposition on silicon solar cells. Its propriety heating and boat design allow for 10[%] higher throughput than competitiors systems, while maintaining good colour uniformity.

Key system features

  • High throughput >200 MW / system
  • The system allows for better color uniformity than achieved on conventional direct plasma PECVD systems. This is achieved by using our uniquely designed boat
  • In situ AlOx + SiNx solution available for PERC cell processing
  • Tempress’ PID solution has proven to pass even the most stringent PID tests without any cell efficiency penalty
  • Graded layers for efficiency enhancement
  • Up to 210 mm wafer size

Customer benefits

  • Superior passivation at the surface and in the bulk of the cell, due to the exposure to the direct plasma
  • Our PID-free solution enables production of high efficiency cells that are proven to be resistant to PID
  • The confinement of the plasma to the substrates and boat ensures only negligible chamber cleaning and maximum productivity of the equipment

Are you looking for High Performance Solar PV Solutions And Testing Equipment?

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+91 80 23640503
+91 9964314771

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